Fig. 2: Demonstration of 1D interference patterns.

a Schematic illustration for an \(n=2\) interference pattern in an off-axis system, with a symmetric beam offset, \(\pm R\). The superimposition of two angular beams passing through a ring-shaped nanoaperture forms a 3D surface with a larger amount of material deposited at the intersect of two rings. b Scanning electron microscope (SEM) images for a bullseye nanoaperture and the fabricated Moiré interference patterns made by Au, with precisely controlled values of \(R\). Scale bars, 10 µm. c, d Comparison for phosphorescence (left) and AFM height (right) images of \(n=1\) (c) and \(n=2\) (d) 3D surfaces made by Ir(ppy)3:CBP. Scale bars, 10 µm. e, f Understanding \(n=\infty\) slit interference patterns formed by evaporating Ge through multiple parallel slits of width s1 and spacing \({s}_{2}\), which forms a “cat-head” 3D line surface for \({s}_{2}\gg R\) (e). With decrease of \({s}_{2}\), the interaction between material wavefronts lead to more complex 3D surfaces, which can be mapped on a “phase diagram” constructed with respect to two dimensionless parameters, \({\lambda }_{1}={s}_{1}/({s}_{1}+{s}_{2})\) and \({\lambda }_{2}={s}_{1}/({s}_{1}+2R)\). Four major groups of 3D surfaces are identified, as revealed by the experimentally measured (Exp.) AFM topography for the fabricated 3D line surfaces and corresponding CL simulations. Scale bars, \(({s}_{1}+{s}_{2})\) (f). The colors in each figure indicate the intensity of normalized height z from experimental AFM measurements or normalized probability from CL model.