Fig. 5: Demonstration of self-aligned superlattice patterns based on the square nanopore lattices.

a Superlattices that superimpose a vacant interference pattern by depositing Ag along the incident trajectory (green circle) of \(\varphi={5}^{\circ }\) and a constructive pattern by perpendicular deposition of Ge (red dot). The AFM height images present superlattices deposited through nanoapertures of square nanopore lattices, with \(r=75\) nm and \(L=550\), \(650\), and \(1150\) nm (left to right). b SEM and EDS mapping images that clearly differentiate Ag and Ge distributions in the superlattice of \(r=75\) nm and \(L=1150\) nm. c A flower-shape 3D surface made by Au. The superimposition of three vacant interference patterns were fabricated using three isolatitude incident trajectories at \(\varphi={7}^{\circ }\), \({10}^{\circ }\), and \({13}^{\circ }\). d False-color SEM image showing a symmetry-breaking superlattice pattern fabricated by the depositions of Al₂O₃ along the blue incident trajectory (\(\varphi={10}^{\circ }\); \(\theta=0\) to \({270}^{\circ }\)) and Ge at the red incident angle \(\left(\theta,\varphi \right)=({315}^{\circ },{10}^{\circ })\). e False-color SEM image showing a quinary chiral superlattice comprised of 5 “meta-atoms” made by Ag, Au, Ge, SiO₂, and Ti. The first four materials were deposited at incident angles \(\left(\theta,\varphi \right)\) of \(({0}^{\circ },{10}^{\circ })\), \((9{0}^{\circ },{10}^{\circ })\), \((18{0}^{\circ },{10}^{\circ })\), and \((27{0}^{\circ },{10}^{\circ })\), respectively. The Ti pattern was deposited along an isolatitude incident trajectory at \(\varphi={0.5}^{\circ }\). Scale bars in all images, 1 μm.