Fig. 1: Geometry and temperature profile for three types of microheaters. | Nature Communications

Fig. 1: Geometry and temperature profile for three types of microheaters.

From: Microheater hotspot engineering for spatially resolved and repeatable multi-level switching in foundry-processed phase change silicon photonics

Fig. 1: Geometry and temperature profile for three types of microheaters.The alternative text for this image may have been generated using AI.

(a) Bowtie-shaped (b) five 10 × 2 μm bridges with 2 μm spacing, and (c) five 5 μm-long bridges with varying widths of 1, 1.5, 3, 1.5, 1 μm and 1 μm separation. Each figure shows the top view of the devices featuring phase change material (PCM) cells, silicon waveguides, and the microheater, as well as the 3D temperature profiles and the temperature along the microheater, all simulated at the end of a 400 ns and of 5.5 V electrical pulse. Tm, the melting temperature, is approximately 890 K for Sb2Se3 and Ge2Sb2Se4Te, the PCMs we study.

Back to article page