Fig. 2: Type I microheater. | Nature Communications

Fig. 2: Type I microheater.

From: Microheater hotspot engineering for spatially resolved and repeatable multi-level switching in foundry-processed phase change silicon photonics

Fig. 2: Type I microheater.The alternative text for this image may have been generated using AI.

a Bowtie-shaped microheater with 30 nm-thick Sb2Se3. b Reversible switching using 3.4 V–0.1 ms to partially crystallize, 3.4 V–1 ms to crystallize fully, and 21 V–400 ns to amorphize. c Spectra for a ring resonance showing the cycles highlighted in (b).

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