Fig. 6: Type III microheater with a waveguide for thermoreflectance characterization. | Nature Communications

Fig. 6: Type III microheater with a waveguide for thermoreflectance characterization.

From: Microheater hotspot engineering for spatially resolved and repeatable multi-level switching in foundry-processed phase change silicon photonics

Fig. 6: Type III microheater with a waveguide for thermoreflectance characterization.The alternative text for this image may have been generated using AI.

a Scanning electrom microscopy image of the device with three temperature-tracking points (b) Maximum temperature of the tracking points as a function of electrical power applied on the device. c, d Transient thermoreflectance images of 2 devices at the end of 500 ns pulse with (c) 16 V (d) The applied voltage pulse (16 V–500 ns) and cooling curve in an experiment comparing with the simulation cooling curve.

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