Fig. 2: Atomic-resolution STEM studies of the ~20-nm-thick HfO2/ZrO2 superlattice with n = 3. | Nature Communications

Fig. 2: Atomic-resolution STEM studies of the ~20-nm-thick HfO2/ZrO2 superlattice with n = 3.

From: Enhancing ferroelectric stability: wide-range of adaptive control in epitaxial HfO2/ZrO2 superlattices

Fig. 2: Atomic-resolution STEM studies of the ~20-nm-thick HfO2/ZrO2 superlattice with n = 3.

a Atomically resolved HAADF-STEM image of the superlattice film. Inset shows the corresponding fast Fourier transform of the image, highlighting superstructure spots indicated by white arrows. b Atomic-scale EDXS mapping of Hf M and Zr L- signals, revealing a chemically well-defined superlattice structure. c Enlarged view of the HfO2 and ZrO2 layers, both manifesting an evident zig-zag arrangement of Hf or Zr atomic layers, characteristic of the o-phase.

Back to article page