Fig. 2: System-induced signal distortion and system factors.
From: Ultra-wide-field imaging Mueller matrix spectroscopic ellipsometry for semiconductor metrology
a The schematic of the relative transmittance (RT). Light arrived at each pixel traversed distinct regions of a polarizer, where optical properties such as transmittance vary spatially. Furthermore, these properties are also changed with the rotation of the polarizer. b The schematic of matrix reformulation. By utilizing the characteristics that the polarizer MM can be decomposed into two vectors, the measured intensity signal was reformulated as a product of scalars: the PSG, PSA factor, and kernel factor. c The obtained PSG factor at a wavelength of 405 nm for rotation angles of 0°, 90°, 180°, and 270°. d, e The mean (\(\mu \)) and standard deviations (\(\sigma \)) values for PSG factor across all wavelength and polarization conditions. f The PSA factor under the same wavelength and polarization conditions as shown in (c). g, h \(\mu \) and \(\sigma \) for PSA factor across all wavelength and polarization conditions.
