Table 3 Throughput of conventional SEM and IMMSE

From: Ultra-wide-field imaging Mueller matrix spectroscopic ellipsometry for semiconductor metrology

 

Measurement Points (pts)

Measurement Time (s)

Throughput (s/pts)

SEM

5994

4196

0.700

IMMSE

11,912,908

12,600

0.001

  1. The throughput is calculated based on the measurement points over full wafer area and total measurement time.
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