Fig. 1: Limitations of existing nanopositioning technologies and the structure and principle of the proposed stick-slip AFM nanopositioner.
From: Cross-scale high-bandwidth atomic force microscopy with a stick-slip nanopositioner
a Direct-drive nanopositioners suffer from the trade-off between range and resonance frequency. b Stick-slip nanopositioners in pure stepping mode cannot achieve nanometer precision due to the high uncertainty caused by the friction-induced backward motion effect. c Structure of the proposed AFM nanopositioner. Principle of stick-slip nanopositioners in d the stepping mode and e the scanning mode. AFM: atomic force microscopy, \(T\): period of the sawtooth signal, \(\Delta\): displacement at moment-2, \({\Delta }_{{{\rm{step}}}}\): the net step size.
