Fig. 2: Seamless transition between stepping and scanning enables cross-scale nanopositioning and tracking.
From: Cross-scale high-bandwidth atomic force microscopy with a stick-slip nanopositioner
Statistical stepping velocity of the a X-stage and b Y-stage under various voltage amplitudes, and that of the c X-stage and d Y-stage under various excitation frequencies. Cross-scale point-to-point nanopositioning performance under closed-loop control. e Main motion and f parasitic motion of the X-axis. g Main motion and h parasitic motion of the Y-axis. Tracking results of the 1 mm × 1 mm i circular, k square, and m triangular trajectories under the frequencies of 0.05 Hz, 0.2 Hz, 1 Hz, and 5 Hz. Corresponding errors of the tracking of j circular, l square, and n triangular trajectories.
