Fig. 1: Concept and device images.
From: Piezoelectrically actuated silicon-nitride-based high-speed spatial light modulator
a, b Concept figure of our spatial light modulator (SLM) technology based on piezoelectrically actuated SiN resonant waveguide gratings. The piezoelectric actuators are based on AlN thin films. c Device operation principle. Applying a voltage shifts the reflection spectrum. d Chip with 4 × 4 SLM wire bonded to a printed circuit board (PCB). See Methods for packaging details. e Microscope image of 4 × 4 SLM with a 50 μm pixel pitch and 1 μm wide trenches in between pixels. f Scanning electron microscope (SEM) image showing a grating surrounded by trenches.
