Fig. 3: Characteristics of low Q-value micro-electro-mechanical system (MEMS) mirror and driver.
From: Super-dense point clouds acquired by an ultralight 10 g solid-state single photon LiDAR
a Frequency response of optical scanning full angle for two samples. A 20 V peak-to-peak voltage is applied to lead-free piezoelectric actuators of the MEMS mirror to perform vertical scanning. b Optical scanning angle in the horizontal direction under the same conditions as the vertical direction. c Resonance amplitude decay scanned in vertical direction (blue), horizontal direction (red), and fitted curves (black). d Schematic for up-down direct digital synthesis (UD-DDS). e Sin wave generation by the UD-DDS. f Experimental frequency analysis of the UD-DDS. g Non-repetitive Lissajous trajectories. h Repetitive Lissajous trajectories. Both trajectories are captured at an exposure time of 198 ms. The field-of-view is 42° × 26° when a 28 V peak-to-peak voltage is applied.
