Fig. 2: The method to minimize material loss of LFP electrodes during laser percussion drilling.

a–d SEM and backlight microscope images showing micro-hole arrays created by femtosecond laser percussion drilling with different Numerical Aperture (NA = 0.4, 0.45, 0.5) objective lenses and different wavelengths (800 nm, 400 nm). e The relationship between aperture size across different NAs and wavelengths. f The effects of objective lens NA and laser wavelength on the diameter and aspect ratio of laser-drilled holes. g Influence of hole size/distribution on rate performance, including configurations of 6–60 μm, 10–120 μm, 20–240 μm, 30–360 μm.