Table 2 Performance comparison of some inverse-designed MUXs

⁴³

SOI

TE₀ ~ TE₄

6 × 10 μm²

<3.94 dB

<−20.7 dB

⁴⁴

SOI

TE₀ ~ TE₃

4.8 × 4.8 μm²

<2.95 dB

<−13 dB

¹⁵

SOI

TE₀ ~ TE₃

6.5 × 6.5 μm²

<1.5 dB

<−16.3 dB

⁴⁵

SOI

TE₀ ~ TE₃

5.4 × 2.7 μm²

<0.93 dB

<−13.5 dB

⁴⁶

SOI

TE₀ ~ TE₂

6 × 4.8 μm²

<4.3 dB

<−11.3 dB

⁴⁷

SNOI

TE₀ ~ TE₄

16 × 7 μm²

<2.3 dB

<−10.6 dB

¹⁷

TFLNOI (Z-cut)

TE₀, TE₁

12 × 12 μm²

<3.0 dB

<−15.8 dB

This work

SiN-TFLNOI (X-cut)

TE₀ ~ TE₂

19 × 25 μm²

<2.5 dB

<−15.9 dB