Fig. 4: Electrostatic-trapping method for single ND placement is highly reproducible.
From: Wafer-scale integration of single nanodiamonds via electrostatic-trapping
a, c SEM images showing a 25 × 25 ND array before (a) and after (b) template removal. b, d Enlarged SEM images of four 5 × 3 ND arrays randomly selected from (a) and (c), respectively. Single ND arrays are consistently obtained. The NDs remained in place even after template removal. e Statistics of the relative positions of NDs within the template holes of a 25 × 25 array. Most NDs were trapped within 500 nm from the hole’s center. f Statistical analysis across five 25 × 25 array samples show 82.5% template holes contained a single ND. g Compared to other methods 24,27,31 used to obtain single ND array, our electrostatic-trapping method achieved the largest patterning area and highest single ND yield.
