Fig. 2: HAADF-STEM characterization and strain analysis of the HZO/HLO film.
From: Approaching theoretical polarization limit in HfZrO2/HfLaO2 multilayers
a Cross-sectional HAADF-STEM image of the HZO/HLO film. b Zoomed-in cross-sectional image with corresponding FFT simulation. Larger light-blue dots represent Hf/Zr/La atoms, whereas smaller light-blue dots represent oxygen atoms. c Interplanar spacing measurements for the (111) and (11-1) planes. Error bars indicate the uncertainty in interplanar spacing calculated from a statistical analysis of multiple measurements performed on different regions of the sample. d Wide range cross-sectional STEM image of the HZO/HLO film. GPA analysis of the (e) in-plane strain (εxx) and (f) out-of-plane strain (εyy) within the HZO/HLO film. Positive values represent tensile strain, while negative values indicate compressive strain.
