Table 1 Structural parameters of HZO and HZO/HLO on LSMO/STO(001)

From: Approaching theoretical polarization limit in HfZrO2/HfLaO2 multilayers

Sample

α (°)

β (°)

γ (°)

Rhombohedral distortion (°)

HZO

89.90 ± 0.01

90.07 ± 0.02

89.90 ± 0.15

/

HZO/HLO

89.48 ± 0.05

89.66 ± 0.01

89.44 ± 0.08

− 0.48 ± 0.05