Fig. 2: Wafer-scale photopatterning of LMPs. | Nature Communications

Fig. 2: Wafer-scale photopatterning of LMPs.

From: Universal cryogenic transfer of liquid metal particles in polymers for wafer-scale stretchable integrated electronics

Fig. 2: Wafer-scale photopatterning of LMPs.The alternative text for this image may have been generated using AI.

a Photograph of the wafer-scale LMP film and magnified SEM image of the film. b Top view SEM images of patterned LMP lines with various line widths ranging from 5 μm to 500 μm. c Surface roughness of coated LMP film at each position on a 4-inch wafer. The dashed line indicates the average thickness of the film, while the bars present the roughness at each position. d Electrical conductivity of the LMP lines before and after the wet-etching process. e Photograph of a wafer-scale patterned LMP film (left) and magnified optical microscope image of the patterned LMP (right). f The measured height profiles of the fabricated LMP patterns.

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