Fig. 6: Experimental strain and composition characterization of a Si-Si0.87Ge0.13 multilayer stack. | npj Computational Materials

Fig. 6: Experimental strain and composition characterization of a Si-Si0.87Ge0.13 multilayer stack.

From: Disentangling multiple scattering with deep learning: application to strain mapping from electron diffraction patterns

Fig. 6: Experimental strain and composition characterization of a Si-Si0.87Ge0.13 multilayer stack.

a Virtual bright field calculated from center disk. b Composition and c relative thickness, estimated from STEM-EELS. d Diffraction patterns corresponding to the probe positions marked in (a), with estimated Bragg disk positions from e correlation template matching and f FCU-Net. g Strain maps measured from correlation template matching. h Strain maps measured from FCU-Net. i Mean strain values parallel to the multilayer normal direction, for correlation, FCU-Net, and estimated from the STEM-EELS composition. Scale bars are equal to 10 nm.

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