Extended Data Fig. 6: Production of large-scale 20 nm-thick membrane.
From: Atomic lift-off of epitaxial membranes for cooling-free infrared detection
a, Optical microscopic image of an exfoliated film with a size of 10 × 10 mm2. b, Rocking curve of 20 nm-thick PMN-PT grown on STO with a FWHM of 0.283° indicating good crystallinity. c, EBSD maps with 4 × 4 positions over the entire membrane (top) and histograms showing misorientation angle distribution extracted from the maps (bottom). The misorientation angle distribution shows a peak position of 0.17° and a FWHM value of lower than 0.19°, confirming the maintained crystallinity on a large scale after exfoliation.
