Extended Data Fig. 1: The complete fabrication process flow of the HIBC solar cell.

The cell fabrication process comprises 14 major steps including Step 1. Wet chemical cleaning 1, Step 2. CVD deposition 1, Step 3. phosphorus diffusion, Step 4. CVD deposition 2, Step 5. laser patterning 1, Step 6. wet chemical cleaning 2, Step 7. CVD deposition 3, Step 8. wet chemical cleaning 3, Step 9. CVD deposition 4, Step 10. laser patterning 2, Step 11. laser patterning 3, Step 12. Physical vapour deposition, Step 13. isolation, and Step 14. Metallization.