Fig. 1
(a) Microscopic image of ferroelectric capacitors with the area of 80 μm-by-80 μm. (b) Illustrated cross-sectional view and (c) fabrication process flow for the capacitor.
Fig. 1 | Scientific Reports
(a) Microscopic image of ferroelectric capacitors with the area of 80 μm-by-80 μm. (b) Illustrated cross-sectional view and (c) fabrication process flow for the capacitor.
