Fig. 2
TEM images and EDS analysis of (a) W-based MFM capacitor and (b) WO3-based MFM capacitor. The XPS depth profile of (c) W-based MFM capacitor and (d) WO3-based MFM capacitor.
Fig. 2 | Scientific Reports
TEM images and EDS analysis of (a) W-based MFM capacitor and (b) WO3-based MFM capacitor. The XPS depth profile of (c) W-based MFM capacitor and (d) WO3-based MFM capacitor.
