Table 1 The antenna widths, spacings, and pitches for six selected devices among 16 devices are summarized.
Device | Width | Space | Pitch |
|---|---|---|---|
(1, 1) | 39 nm | 119 nm | 158 nm |
(1, 2) | 47 nm | 116 nm | 163 nm |
(1, 3) | 53 nm | 115 nm | 168 nm |
(2, 1) | 43 nm | 115 nm | 158 nm |
(2, 2) | 55 nm | 108 nm | 163 nm |
(2, 3) | 65 nm | 103 nm | 168 nm |