Fig. 3
From: Effect of substrate temperature on properties of WS2 thin films

(a) XRD patterns and (b) Raman spectra of WS2 deposited on various substrate temperatures by RF magnetron sputtering technique, and (c) a comparison between the variations in crystalline micro-strains (for main diffraction orientation (104)) and phonon lifetimes (for 416 cm−1 Raman peak).