Table 1 Parameters and their respective values for the deposition of WS2 thin films.
From: Effect of substrate temperature on properties of WS2 thin films
Parameters | Value |
|---|---|
Base pressure | 8.5 × 10−5 Torr |
Working pressure | 7 × 10−3 Torr |
RF power | 75 w |
Argon gas flow | 10 SCCM |
Substrate temperature | 25, 100, 200, 300 °C |
