Table 3 Crystallographic parameters of the samples, based on the main diffraction orientation (104) and Raman FWHM for 416 cm−1 peak.

From: Effect of substrate temperature on properties of WS2 thin films

Sample

(104) (°)

FWHM XRD (°)

D(nm)

\(\:{\updelta\:}(\times\:{10}^{-3}{\text{n}\text{m}}^{-2})\)

\(\:{\upepsilon\:}(\times\:{10}^{-3})\)

FWHM Raman (cm−1)

T25

37.60

0.96

9.13

12.02

3.97

13.82

T100

37.52

0.96

9.14

12.00

3.96

13.04

T200

37.35

0.60

14.62

4.68

2.48

11.85

T300

37.60

0.72

12.19

6.72

2.97

22.87