Table 3 The role of fabrication tolerance of GaAs layers thickness on the sensitivity of the designed sensor.
Fabrication tolerance (nm) | Sensitivity (THz/Tesla) |
|---|---|
– 100 | 0.0364 |
– 80 | 0.0366 |
– 60 | 0.0364 |
– 40 | 0.0366 |
– 20 | 0.0366 |
Optimized thickness (8.5 μm) | 0.0368 |
+ 20 | 0.0366 |
+ 40 | 0.0366 |
+ 60 | 0.0366 |
+ 80 | 0.0368 |
+ 100 | 0.0366 |