Fig. 4

(a) Positive ions in the plasmas by QMS formed using CHF₃, C₂H₂F₄, and C₂H₂F₄+CF₄O-based gas in Fig 3. (b) Intensities of each positive ion. (c) OES wide scan data for CHF₃, C₂H₂F₄, and C₂H₂F₄+CF₄O-based gas in Fig 3. OES narrow scan data related to (d) F, (e) O, and (f) H normalized by He.