Fig. 3

Normalized C_G-V_G (C_G/C_OX-V_G) curves measured at low (f = 100 Hz) and high (f = 1 MHz) frequencies for SA TG coplanar IGZO TFTs with channel lengths of (a) 3 µm, (b) 12 µm and (c) 20 µm. (d) Energy distribution of subgap DOS value (g(E)) extracted from the fabricated SA TG coplanar IGZO TFTs with L = 3 µm, 12 µm, and 20 µm near E_C.