Fig. 4

Frequency dependence of SID/ID2 values measured at various IDs for SA TG coplanar IGZO TFTs with channel lengths of (a) 3 µm, (b) 12 µm, and (c) 20 µm.

Frequency dependence of SID/ID2 values measured at various IDs for SA TG coplanar IGZO TFTs with channel lengths of (a) 3 µm, (b) 12 µm, and (c) 20 µm.