Fig. 6

Spatial distribution of NBs with respect to the distance from the IGZO/SiO2 interface in SA TG coplanar IGZO TFTs with channel lengths of (a) 3 µm, (b) 12 µm, and (c) 20 µm.

Spatial distribution of NBs with respect to the distance from the IGZO/SiO2 interface in SA TG coplanar IGZO TFTs with channel lengths of (a) 3 µm, (b) 12 µm, and (c) 20 µm.