Fig. 7

Comparison of the spatial distributions of carrier concentration and hydrogen diffusion effects in (a) short-channel (L = 3 µm) and (b) long-channel (L = 12 or 20 µm) SA TG coplanar IGZO TFTs.

Comparison of the spatial distributions of carrier concentration and hydrogen diffusion effects in (a) short-channel (L = 3 µm) and (b) long-channel (L = 12 or 20 µm) SA TG coplanar IGZO TFTs.