Fig. 7
COMSOL simulation results for the surface morphology distributions of Ta2O5 films with different APS oxygen flow rates: (a) 25, (b) 30, and (c) 35 sccm.
Fig. 7 | Scientific Reports
COMSOL simulation results for the surface morphology distributions of Ta2O5 films with different APS oxygen flow rates: (a) 25, (b) 30, and (c) 35 sccm.
