Fig. 2
From: Impact of electron cyclotron wave resonance plasma on defect reduction in ZnO thin films
FE-SEM images showing the surface morphology of the ZnO films deposited at PECWR of 0 W, 100 W, 200 W, 300 W, and 380 W. The magnification of the SEM images is 20000x. FE-SEM images for other magnifications can be seen in Supplementary Fig. S8.
