Fig. 3
From: Impact of electron cyclotron wave resonance plasma on defect reduction in ZnO thin films
Raman spectra of the ZnO films. The peaks at 276 cm–1, 511 cm–1, and 581 cm–1 (identified by red fonts in the graph) which are associated with defects in the ZnO crystal and individual bonds do not appear in the films deposited with PECWR of 200 W, 300 W, and 380 W.
