Table 2 Crystallite size (in nm) for each of the peaks indexed in the XRD spectra.
From: Impact of electron cyclotron wave resonance plasma on defect reduction in ZnO thin films
PECWR (W) | (100) | (002) | (101) | (102) | (110) | (103) | (112) |
|---|---|---|---|---|---|---|---|
0 | 40.8 | 45.6 | 36.7 | 28.6 | 29.7 | 27.0 | 22.3 |
100 | 40.8 | 47.0 | 30.0 | 34.7 | 27.4 | 28.3 | 22.3 |
200 | 45.7 | 47.0 | 26.9 | 38.1 | 29.7 | 28.3 | 27.0 |
300 | 31.0 | 32.3 | 20.7 | 27.1 | 19.8 | 19.4 | 16.9 |
380 | 27.2 | 32.3 | 23.5 | 26.6 | 20.4 | 18.4 | 19.1 |
