Table 3 Dark current, photocurrent, and photosensitivity for an applied bias voltage of 5 V.

From: Impact of electron cyclotron wave resonance plasma on defect reduction in ZnO thin films

ECWR power

(W)

0

100

200

300

380

Dark current

(nA)

3.10 × 106

5.60 × 104

2.05 × 10–3

9.3 × 10–4

1.53 × 10–3

Photocurrent

(nA)

3.88 × 106

4.11 × 105

7.15 × 104

7.56 × 102

2.16 × 104

Photosensitivity

0.253

6.34

3.49 × 107

8.15 × 105

1.41 × 107