Fig. 2
From: A progressive wafer scale approach for Sub-10 nm nanogap structures
Electron microscopy observations of nanogaps. (a–d) FE-SEM images of a nanogap slot antenna array. (a, b) Top-view images of the array, and (c, d) higher-magnification top-view and cross-sectional images of the nanogap highlighted by the dotted box in (b). (e, f) The cross-sectional images of a nanogap obtained using Cs-STEM images acquired at magnifications of (e) 200k and (f) 500k. The image in (f) corresponds to the dotted square box in (e). The formation of 5 nm nanogaps is clearly visible.
