Fig. 5
From: A progressive wafer scale approach for Sub-10 nm nanogap structures
(a) Mass production of Au/Ti-Pt nanogaps with a dumbbell-shaped array on a sapphire wafer. (b–d) An Au/Ti-Pt wire featuring a 6 nm nanogap at its center, observed using (b) an optical microscope and FE-SEM measurements captured at magnifications of (c) 45k and (d) 100k. The Au layer prevents oxidation of the Ti layer. The dumbbell-shaped array was fabricated through an additional post-process following the fabrication of nanogap slits, as illustrated in Fig. S6.
