Extended Data Fig. 3: Assembly of a ki-MEA with shuttle array.
From: Flexible kirigami microelectrode arrays for neuronal activity recordings in non-human primate brains
a, Schematic of a ki-MEA supported on a PMMA-coated silicon substrate. The silicon substrate was patterned with arrays of holes using deep silicon etching. b, Representative SEM image of a spiral supported on a PMMA-coated silicon substrate (n = 12 spiral threads). The right images are the enlarged views highlighted in the red box in the left image. Scale bars, 200 μm and 20 μm (magnified views). c, Optical images showing the alignment process of a shuttle array (SA) with a ki-MEA. Scale bar, 500 μm. d, Photos showing a SA/ki-MEA assembly stabilized with a PVA carrier. Scale bars, 2 mm and 1 mm (magnified view). e, Photos showing a released SA/ki-MEA assembly. Scale bars, 2 mm and 1 mm (magnified view). f, Optical images showing the optical fiber tips passing through the microholes of the spiral threads. Scale bars, 500 μm and 200 μm (magnified view).
