Fig. 2

Atomic resolution elemental map of i-phase GST at initial stage. a The HAADF image of i-phase GST alloy projected along \([1\overline{1}0]\) orientation, the dashed white line along anionic atoms shows f-phase stacking feature. The atomic model is shown in the center area, and lines 1–6 denote the cationic layer, respectively. b HAADF image extracted from the yellow rectangle in (a), and the intensity profile is calculated from the dark columns (denoted as red rectangle in the lower part) exhibiting a decreasing intensity trend. c–h are the atomic mapping resolutions of Ge, Sb, and Te atoms taken from areas 2 and 3, respectively. The EDS profiles along [111] orientation are also presented on the right-hand side of each picture. Scale bar: (a–h) 1 nm