Fig. 3

Atomic resolution elemental maps of i-phase GST at a deeper migration degree. a HAADF image of i-phase GST alloy projected along \([1\overline{1}0]\) orientation. Lines 1–6 denote the cationic layer, respectively. b–e The atomic resolution maps of Ge, Sb, and Te atoms and the overlay of three elements taken from area 4 (denoted as yellow rectangle). The EDS profiles along [111] orientation are present on the right-hand side in every picture. Scale bar: (a–e) 1 nm