Fig. 2: ALD growth and crystallinity.

a QCM frequency change per ALD cycle as a function of pulse and purge parameters. b QCM frequency change during ALD cycle sequences of Tb2bdc3, TbF3 and a 4Sm nanocomposite. Tb(thd)3 pulses are marked in dark grey, H2bdc and NH4F anion pulses are marked in light grey and nitrogen purges are marked in white. An increase and decrease in the graph indicates mass gain and reduction, respectively. c XRD data of xSm films in addition to a deposition of 2000 cycles TbF3.