Fig. 4: Theoretical analysis of hydrogen-related defect states in IGZO thin films.

Density of states (DOS) for (a) \({{{{\rm{H}}}}}_{{{{\rm{O}}}}}^{+}\) and (b) \({({{{\rm{H}}}}-{{{\rm{DX}}}})}^{-}\) models. In (b), the trap level is fully occupied with two electrons. c The charge density distribution of the trap state in (b). d Transition levels of three different substitutional H defects in IGZO. The values of \(\varepsilon (+/-)\) are referenced to the conduction band minimum.