Table 1 The 4H-silicon carbide bulk acoustic wave disk gyroscope performance matrix

From: 4H silicon carbide bulk acoustic wave gyroscope with ultra-high Q-factor for on-chip inertial navigation

Parameter

Value

Size

5 × 5 × 0.5 mm3

Center frequency

3.011 MHz

Polarization voltage

260 V

Ovenization

80 °C

Q

4.6 × 106

Bandwidth

0.32 Hz (open-loop)

Driving voltage

650 mV

Scale factor

215 nA·°−1·s

Angle random walk

0.005°·h−1/2

Bias instability

0.34°h−1

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