Fig. 2: Design, manufacture, and performance of SAW chip based on acoustic impedance effect. | Communications Engineering

Fig. 2: Design, manufacture, and performance of SAW chip based on acoustic impedance effect.

From: Acoustic impedance-based surface acoustic wave chip for gas leak detection and respiratory monitoring

Fig. 2

a Structural diagram of SAW chip and single-cycle chip structure based on acoustic impedance effect, b optical image of the prepared SAW chip based on semiconductor plane technology, and the scale of SAW chip is less than 16 mm × 3.5 mm × 0.5 mm. c IDTs structure of SAW chip under optical microscope, d aluminum surface morphology of IDTs characterized by SEM, e electrode thickness of IDTs tested by step meter, and f frequency response of SAW sensor tested by network analyzer.

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