Fig. 4: High-speed operation of the modulator.

a Characterisation setup. Eye diagrams for an NRZ modulation at 50 Gb s−1 in the case of (b) the Si wafer and the SOI wafer. c Higher data rate eye diagrams for a Si-substrate device and for NRZ modulation at 64.85 Gb s−1, 82.05 Gb s−1 and 100 Gb s−1. DC direct current, RF radio frequency, MUX multiplexer, GS ground-signal, SMF single-mode fibre, TLS tunable laser source, BPF bandpass filter, DCA digital communication analyzer.