Table 3 Comparison of sensing performance of recently reported humidity senors
Material | Fabrication | Device Type | Testing Range (%RH) | Response (R/R0) | Adsorption/ desportion time | Ref |
|---|---|---|---|---|---|---|
Printed resistive humidity sensors | ||||||
CNF/CB/TX-100 | screen printing | resistive | 30–90 | 120% | 10s / 6s | |
daily carbon ink | paint brush | resistive | 0–95 | 178.7% | 56s / 14s | |
Graphene | CVD | resistive | 10–90 | 1.2% | 0.6 / 0.4 | |
MWCNT/polyimide | in-situ polymerization | resistive | 20–90 | 12.8% | 5s / 600s | |
RGO/PDDA | layered self-assembly | resistive | 11–97 | 37.4% | 108s / 94s | |
PEG / gold nano particles | inkjet printing | resistive | 1.8–95 | 104 | 1.2s / 3s | |
PHEMA | gravure printing | resistive | 30–80 | 172% | - | |
MWCNT w/ integrated printed heater | screen printing | resistive | 10–90 | 55% | 4.6 min / 30.9 min | |
Graphene/methyl red | inkjet printing | resistive | 5–95 | 96.36 | 0.251s / 0.35s | |
polyDADMAC | direct write printing | resistive | 10–90 | > 99% | 7s / 213s | |
Reported SiC humidity sensors | ||||||
SiC 2D nanosheets | spin coating | resistive | 11–95 | - | 3s / 3s | |
SiC on p – Si wafer | PECVD | capacitive | 10–90 | 200% | 3 min / 4 min | |
SiC nanopaper | SiC nanowire compression | resistive | 30–65 | 90% | 41s / 124s | |
SiC nanowires on nanoporous Si pillar array | CVD + etching | capacitive | 11–95 | 960% | 105s / 85s | |
SiC nano particle ink | screen printing | resistive | 10–90 | 45.2% | 18s / 46s | This work |
