Table 1 Imaging performance of different scanning mechanisms for high-speed PAM
Scanning mechanisms | Scanning speed | Scanning range | Lateral Resolution | Pixel Number | Ref. | ||
|---|---|---|---|---|---|---|---|
Laser PRF | Bscan | C-scan | |||||
Voice-coil | 4 kHz | 20 Hz 40 Hz | - | 9 mm 1 mm | 3.4 μm | – | |
Galvanometer | 50 kHz | 250 Hz | 0.5 Hz | 4 × 8 mm2 | 6 μm | 200 × 500 | |
500 kHz | 500 Hz | 2.5 Hz | 2.4 mm | 7.5 μm | 500 | ||
1-axis MEMS | 100 kHz | 400 Hz | 0.8 Hz | 2 × 5 mm2 | 2.4 μm | – | |
2-axis MEMS | 50-kHz | 35 Hz | 0.05 Hz | 2 × 2 mm2 | 12 μm | 700 × 700 | |
Polygon scanner | 600 kHz | 900 Hz | 1/16 Hz | 12 × 20 mm2 | 8.8 µm | ||
800 kHz | 1 kHz | 2 Hz | 11 × 7.5 mm2 | 10 μm | 250 × 250 | ||